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Results: 1
HIGHLY RELIABLE SILICON MICROMACHINED PHYSICAL SENSORS IS MASS-PRODUCTION
Authors:
SASAYAMA T SUZUKI S TSUCHITANI S KOIDE A SUZUKI M NAKAZAWA T ICHIKAWA N
Citation:
T. Sasayama et al., HIGHLY RELIABLE SILICON MICROMACHINED PHYSICAL SENSORS IS MASS-PRODUCTION, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 714-717
Risultati:
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