Authors:
SHINZAWA T
SUGAI K
HAYASHI Y
NAKAJIMA T
KISHIDA S
OKABAYASHI H
TSUNENARI K
MURAO Y
KOBAYASHI A
Citation: T. Shinzawa et al., BARRIER LAYERLESS SUBMICRON ALUMINUM-DAMASCENE INTERCONNECTION USING ALUMINUM CHEMICAL-VAPOR-DEPOSITION WITH A NEW NUCLEATION METHOD, Electronics & communications in Japan. Part 2, Electronics, 79(5), 1996, pp. 88-96