Authors: Tanaka, I Iwasaki, Y Ogusu, M Tamamori, K Sekine, Y Matsumoto, T Maehara, H Hirose, R

Citation: I. Tanaka et al., High-precision binary optical element fabricated by novel self-aligned process, JPN J A P 1, 38(12B), 1999, pp. 6976-6980