Authors: Hyman, D Schmitz, A Warneke, B Hsu, TY Lam, J Brown, J Schaffner, J Walston, A Loo, RY Tangonan, GL Mehregany, M Lee, J

Citation: D. Hyman et al., GaAs-compatible surface-micromachined RF MEMS switches, ELECTR LETT, 35(3), 1999, pp. 224-226