Authors: Miller, SL Rodgers, MS La Vigne, G Sniegowski, JJ Clews, P Tanner, DM Peterson, KA

Citation: Sl. Miller et al., Failure modes in surface micromachined microelectromechanical actuation systems, MICROEL REL, 39(8), 1999, pp. 1229-1237

Authors: Tanner, DM Miller, WM Peterson, KA Dugger, MT Eaton, WP Irwin, LW Senft, DC Smith, NF Tangyunyong, P Miller, SL

Citation: Dm. Tanner et al., Frequency dependence of the lifetime of a surface micromachined microengine driving a load, MICROEL REL, 39(3), 1999, pp. 401-414