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Results: 1-2 |
Results: 2
CD dispersion across the lens field: Influence on transistor characteristics
Authors: Toublan, O Schiavone, P Gwoziecki, R Boutin, D
Citation: O. Toublan et al., CD dispersion across the lens field: Influence on transistor characteristics, MICROEL ENG, 53(1-4), 2000, pp. 91-94
Determination of the critical dimension and proximity bias variations across the lens field by electrical linewidth measurements
Authors: Toublan, O Boutin, D Schiavone, P
Citation: O. Toublan et al., Determination of the critical dimension and proximity bias variations across the lens field by electrical linewidth measurements, JPN J A P 1, 37(12B), 1998, pp. 6703-6708
Risultati: 1-2 |