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Citation: Pe. Tuma et L. Tousignant, New "green" heat transfer fluids, SOL ST TECH, 43(6), 2000, pp. 175

Authors: Pruette, L Karecki, S Reif, R Tousignant, L Reagan, W Kesari, S Zazzera, L

Citation: L. Pruette et al., Evaluation of C4F8O as an alternative plasma-enhanced chemical vapor deposition chamber clean chemistry, J ELCHEM SO, 147(3), 2000, pp. 1149-1153