Authors: Normand, P Beltsios, K Kapetanakis, E Tsoukalas, D Travlos, T Stoemenos, J Van Den Berg, J Zhang, S Vieu, C Launois, H Gautier, J Jourdan, F Palun, L

Citation: P. Normand et al., Formation of 2-D arrays of semiconductor nanocrystals or semiconductor-rich nanolayers by very low-energy Si or Ge ion implantation in silicon oxide films, NUCL INST B, 178, 2001, pp. 74-77