Authors: Trager-Cowan, C McColl, D Sweeney, F Grimson, STF Treguer, JF Mohammed, A Middleton, PG Manson-Smith, SK O'Donnell, KP Van der Stricht, W Moerman, I Demeester, P Wu, MF Vantomme, A Zubia, D Hersee, SD

Citation: C. Trager-cowan et al., Probing nitride thin films in 3-dimensions using a variable energy electron beam, MRS I J N S, 5, 2000, pp. NIL_347-NIL_352