Authors:
MIZUNO F
KATO M
HAYAKAWA H
SATO K
HASEGAWA K
SAKITANI Y
SAITOU N
MURAI F
SHIRAISHI H
UCHINO SI
Citation: F. Mizuno et al., APPLICATION OF A HIGH-THROUGHPUT ELECTRON-BEAM SYSTEM FOR 0.3 MU-M LARGE-SCALE INTEGRATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3440-3443