Authors: MIZUNO F KATO M HAYAKAWA H SATO K HASEGAWA K SAKITANI Y SAITOU N MURAI F SHIRAISHI H UCHINO SI

Citation: F. Mizuno et al., APPLICATION OF A HIGH-THROUGHPUT ELECTRON-BEAM SYSTEM FOR 0.3 MU-M LARGE-SCALE INTEGRATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3440-3443