Authors:
KADO H
YAMAMOTO S
YOKOYAMA K
TOHDA T
UMETANI Y
YANO K
Citation: H. Kado et al., OBSERVATION OF THE BOTTOM SURFACE OF CONTACT HOLES BY HOPPING SCANNING ATOMIC-FORCE MICROSCOPY WITH A ZNO WHISKER TIP, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(3), 1994, pp. 1923-1926