Login
|
New Account
AAAAAA
ITA
ENG
Results:
1-1
|
Results: 1
DOUBLE-STEP INTEGRATED DEPOSITION PROCESS FOR MULTILAYERS WITH ACCURATE PERIODICITY
Authors:
USOSKIN AI FREYHARDT HC SEMINOZHENKO VP POPOVA OA
Citation:
Ai. Usoskin et al., DOUBLE-STEP INTEGRATED DEPOSITION PROCESS FOR MULTILAYERS WITH ACCURATE PERIODICITY, Microelectronic engineering, 25(2-4), 1994, pp. 299-304
Risultati:
1-1
|