Authors:
KOSAREV AI
SMIMOV AS
ABRAMOV AS
VINOGRADOV AJ
USTAVSCHIKOV AY
SHUTOV MV
Citation: Ai. Kosarev et al., EFFECT OF ION-BOMBARDMENT IN VERY-HIGH FREQUENCY GLOW-DISCHARGE ON GROWTH AND PROPERTIES OF SIHX FILMS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(2), 1997, pp. 298-306