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Authors: KOSAREV AI SMIMOV AS ABRAMOV AS VINOGRADOV AJ USTAVSCHIKOV AY SHUTOV MV
Citation: Ai. Kosarev et al., EFFECT OF ION-BOMBARDMENT IN VERY-HIGH FREQUENCY GLOW-DISCHARGE ON GROWTH AND PROPERTIES OF SIHX FILMS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(2), 1997, pp. 298-306
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