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Citation: Ps. Sreejith et al., Recent advances in machining of silicon wafers for semiconductor applications, INT J ADV M, 17(3), 2001, pp. 157-162

Authors: Udupa, G Ngoi, BKA

Citation: G. Udupa et Bka. Ngoi, Form error characterisation by an optical profiler, INT J ADV M, 17(2), 2001, pp. 114-124

Authors: Udupa, G Singaperumal, M Sirohi, RS Kothiyal, MP

Citation: G. Udupa et al., Characterization of surface topography by confocal microscopy: II. The micro and macro surface irregularities (vol 11, pg 315, 2000), MEAS SCI T, 11(5), 2000, pp. 585-585

Authors: Udupa, G Singaperumal, M Sirohi, RS Kothiyal, MP

Citation: G. Udupa et al., Characterization of surface topography by confocal microscopy: I. Principles and the measurement system, MEAS SCI T, 11(3), 2000, pp. 305-314

Authors: Udupa, G Singaperumal, M Sirohi, RS Kothiyal, MP

Citation: G. Udupa et al., Characterization of surface topography by confocal microscopy: II. The micro and macro surface irregularities, MEAS SCI T, 11(3), 2000, pp. 315-329