Authors: Chalamala, BR Uebelhoer, D Dean, KA

Citation: Br. Chalamala et al., Apparatus for quantitative analysis of residual gases in flat panel vacuumpackages, J VAC SCI A, 18(2), 2000, pp. 343-348

Authors: Chalamala, BR Uebelhoer, D Reuss, RH

Citation: Br. Chalamala et al., Apparatus for temperature programmed desorption studies of thin films, REV SCI INS, 71(1), 2000, pp. 320-321