Authors: DEKEERSMAECKER R DECLERCK G FELIX P HAOND M HILL C JANSSEN G LORENZ J MAES H MONTREE A NEPPL F PATRUNO P RUDAN M RYSSEL H VANDENHOVE L VANDERVORST W VANOMMEN A

Citation: R. Dekeersmaecker et al., THE ADEQUAT PROJECT FOR DEVELOPMENT AND TRANSFER OF 0.25 MU-M LOGIC COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR MODULES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(4), 1994, pp. 2852-2859