THE ADEQUAT PROJECT FOR DEVELOPMENT AND TRANSFER OF 0.25 MU-M LOGIC COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR MODULES

Authors
DEKEERSMAECKER R DECLERCK G FELIX P HAOND M HILL C JANSSEN G LORENZ J MAES H MONTREE A NEPPL F PATRUNO P RUDAN M RYSSEL H VANDENHOVE L VANDERVORST W VANOMMEN A
Citation
R. Dekeersmaecker et al., THE ADEQUAT PROJECT FOR DEVELOPMENT AND TRANSFER OF 0.25 MU-M LOGIC COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR MODULES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(4), 1994, pp. 2852-2859
Citations number
22
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
4
Year of publication
1994
Pages
2852 - 2859
Database
ISI
SICI code
1071-1023(1994)12:4<2852:TAPFDA>2.0.ZU;2-K
Abstract
The ADEQUAT project [Advanced Developments for Quarter Micron compleme ntary metal-oxide-semiconductor (CMOS) Technologies] is executed by a European consortium under the JESSI/ESPRIT programs. It aims at develo ping new device structures and process modules for the 0.35 and 0.25 A m CMOS logic technology generations, offering improved performance whi le meeting the reliability and manufacturability constraints. Several examples of choices illustrating this optimization process are present ed together with the overall project organization and roadmap.