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Results: 1-3 |
Results: 3
GROWTH AND CHARACTERIZATION OF RADIOFREQUENCY MAGNETRON-SPUTTERED LEAD-ZIRCONATE-TITANATE THIN-FILMS DEPOSITED ON [111]PT ELECTRODES
Authors: EAKIM B AUBERT P AYGUAVIVES F BISARO R VARNIERE F OLIVIER J PUECH M AGIUS B
Citation: B. Eakim et al., GROWTH AND CHARACTERIZATION OF RADIOFREQUENCY MAGNETRON-SPUTTERED LEAD-ZIRCONATE-TITANATE THIN-FILMS DEPOSITED ON [111]PT ELECTRODES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(5), 1998, pp. 2876-2884
COMPARISON OF DAMAGE AND SI OXIDATION-KINETICS RESULTING FROM ELECTRON-CYCLOTRON-RESONANCE AND DISTRIBUTED ELECTRON-CYCLOTRON-RESONANCE PLASMA PROCESSING
Authors: HU YZ LI M WANG Y IRENE EA HUGON MC VARNIERE F JIANG N FROMENT M AGIUS B
Citation: Yz. Hu et al., COMPARISON OF DAMAGE AND SI OXIDATION-KINETICS RESULTING FROM ELECTRON-CYCLOTRON-RESONANCE AND DISTRIBUTED ELECTRON-CYCLOTRON-RESONANCE PLASMA PROCESSING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(2), 1995, pp. 227-234
ELECTRODE INVESTIGATION AND ELECTRICAL-PROPERTIES OF RF MAGNETRON-SPUTTERED PB(ZR,TI)O-3
Authors: KIM BE VARNIERE F AGIUS B BISARO R
Citation: Be. Kim et al., ELECTRODE INVESTIGATION AND ELECTRICAL-PROPERTIES OF RF MAGNETRON-SPUTTERED PB(ZR,TI)O-3, Microelectronic engineering, 29(1-4), 1995, pp. 231-234
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