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Authors: OBENG YS STEINER KG VELAGA AN PAI CS
Citation: Ys. Obeng et al., DIELECTRIC MATERIALS FOR ADVANCED VLSI AND ULSI TECHNOLOGIES, AT&T technical journal, 73(3), 1994, pp. 94-111

Authors: CHITTIPEDDI S KELLY MJ VELAGA AN KANNAN VC DZIUBA CM COCHRAN WT RAMBABU B
Citation: S. Chittipeddi et al., EFFECT OF DOPANTS ON THE THERMAL-PROCESSING OF SALICIDED (TITANIUM DISALICIDED) CMOS STRUCTURES, Semiconductor science and technology, 8(11), 1993, pp. 2023-2029
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