Authors:
CHITTIPEDDI S
KELLY MJ
VELAGA AN
KANNAN VC
DZIUBA CM
COCHRAN WT
RAMBABU B
Citation: S. Chittipeddi et al., EFFECT OF DOPANTS ON THE THERMAL-PROCESSING OF SALICIDED (TITANIUM DISALICIDED) CMOS STRUCTURES, Semiconductor science and technology, 8(11), 1993, pp. 2023-2029