Authors:
DOMASHEVSKAYA EP
YURAKOV YA
VELIGURA GA
BOCHAROV SA
Citation: Ep. Domashevskaya et al., AES AND USXES INVESTIGATIONS OF THE PHASE-TRANSFORMATION IN THE SURFACE-LAYERS OF V-SI SIO2/SI THIN-FILMS STRUCTURE STIMULATED BY OXYGEN ANNEALING/, Journal of electron spectroscopy and related phenomena, 76, 1995, pp. 511-516