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THEORETICAL-ANALYSIS OF THE IMPURITY DISTRIBUTION IN SINGLE-CRYSTAL SILICON
Authors:
PONOMAREV KV KORZHAVYI PA VELIKOV YK
Citation:
Kv. Ponomarev et al., THEORETICAL-ANALYSIS OF THE IMPURITY DISTRIBUTION IN SINGLE-CRYSTAL SILICON, Physics of the solid state, 39(8), 1997, pp. 1228-1229
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