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Results: 2
MEV ENERGY SULFUR IMPLANTATION IN GAAS AND INP
Authors:
VELLANKI J NADELLA RK RAO MV DIETRICH HB SIMONS DS CHI PH
Citation:
J. Vellanki et al., MEV ENERGY SULFUR IMPLANTATION IN GAAS AND INP, Journal of electronic materials, 22(5), 1993, pp. 559-560
THERMALLY STABLE, BURIED HIGH-RESISTANCE LAYERS IN P-TYPE INP OBTAINED BY MEV ENERGY TI IMPLANTATION
Authors:
MARTIN JM NADELLA RK VELLANKI J RAO MV HOLLAND OW
Citation:
Jm. Martin et al., THERMALLY STABLE, BURIED HIGH-RESISTANCE LAYERS IN P-TYPE INP OBTAINED BY MEV ENERGY TI IMPLANTATION, Journal of applied physics, 73(11), 1993, pp. 7238-7243
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