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Authors: MORRIS KJ VLADIMIRSKY Y VLADIMIRSKY O CALDERON G

Citation: Kj. Morris et al., X-RAY MICROFABRICATION OF MULTILEVEL STRUCTURES AND 3-D PATTERNING, Microelectronic engineering, 35(1-4), 1997, pp. 545-548

Authors: WAALI EE SCOTT JD KLOPF JM VLADIMIRSKY Y VLADIMIRSKY O

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Authors: VLADIMIRSKY Y VLADIMIRSKY O MORRIS KJ KLOPF JM CALDERON GM SAILE V

Citation: Y. Vladimirsky et al., PMMA AS AN X-RAY RESIST FOR MICROMACHINING APPLICATION - LATENT IMAGE-FORMATION AND THICKNESS LOSSES, Microelectronic engineering, 30(1-4), 1996, pp. 543-546

Authors: VLADIMIRSKY Y MORRIS K KLOPF JM VLADIMIRSKY O SAILE V SCOTT J

Citation: Y. Vladimirsky et al., X-RAY-EXPOSURE SYSTEM FOR INDUCED CHEMISTRY AND DRY PROCESSES IN MICROLITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 3109-3113