Authors: WINDT DL BROWN WL VOLKERT CA WASKIEWICZ WK

Citation: Dl. Windt et al., VARIATION IN STRESS WITH BACKGROUND PRESSURE IN SPUTTERED MO SI MULTILAYER FILMS/, Journal of applied physics, 78(4), 1995, pp. 2423-2430

Authors: LIDDLE JA VOLKERT CA

Citation: Ja. Liddle et Ca. Volkert, STRESS-INDUCED PATTERN-PLACEMENT ERRORS IN THIN MEMBRANE MASKS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3528-3532

Authors: VOLKERT CA ALOFS CF LIEFTING JR

Citation: Ca. Volkert et al., DEFORMATION MECHANISMS OF AL FILMS ON OXIDIZED SI WAFERS, Journal of materials research, 9(5), 1994, pp. 1147-1155

Authors: SNOEKS E POLMAN A VOLKERT CA

Citation: E. Snoeks et al., DENSIFICATION, ANISOTROPIC DEFORMATION, AND PLASTIC-FLOW OF SIO2 DURING MEV HEAVY-ION IRRADIATION, Applied physics letters, 65(19), 1994, pp. 2487-2489

Authors: VOLKERT CA

Citation: Ca. Volkert, DENSITY CHANGES AND VISCOUS-FLOW DURING STRUCTURAL RELAXATION OF AMORPHOUS-SILICON, Journal of applied physics, 74(12), 1993, pp. 7107-7113