STRESS-INDUCED PATTERN-PLACEMENT ERRORS IN THIN MEMBRANE MASKS

Authors
LIDDLE JA VOLKERT CA
Citation
Ja. Liddle et Ca. Volkert, STRESS-INDUCED PATTERN-PLACEMENT ERRORS IN THIN MEMBRANE MASKS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3528-3532
Citations number
16
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3528 - 3532
Database
ISI
SICI code
1071-1023(1994)12:6<3528:SPEITM>2.0.ZU;2-Y