AAAAAA
Results:
1-7
|
Results: 7
Authors:
VREDENBREGT EJD
ROOYAKKERS WJM
VUGTS MJM
VANDEHURK PJ
BEIJERINCK HCW
Citation: Ejd. Vredenbregt et al., AR-ASTERISK(P-3(2)) KR-ASTERISK(P-3(0,2))+N-2(X) EXCITATION TRANSFER COLLISIONS - FINAL-STATE ROTATIONAL ALIGNMENT/, Chemical physics, 216(1-2), 1997, pp. 273-279
Authors:
VUGTS MJM
VERSCHUEREN GLJ
EURLINGS MFA
HERMANS LJF
BEIJERINCK HCW
Citation: Mjm. Vugts et al., SI XEF2 ETCHING - TEMPERATURE-DEPENDENCE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(5), 1996, pp. 2766-2774
Authors:
VUGTS MJM
EURLINGS MFA
HERMANS LJF
BEIJERINCK HCW
Citation: Mjm. Vugts et al., SI XEF2 ETCHING - REACTION LAYER DYNAMICS AND SURFACE ROUGHENING/, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(5), 1996, pp. 2780-2789
Authors:
VUGTS MJM
HERMANS LJF
BEIJERINCK HCW
Citation: Mjm. Vugts et al., ION-ASSISTED SI XEF2 ETCHING - TEMPERATURE-DEPENDENCE IN THE RANGE 100-1000 K/, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(5), 1996, pp. 2820-2826
Authors:
VUGTS MJM
HERMANS LJF
BEIJERINCK HCW
Citation: Mjm. Vugts et al., ION-ASSISTED SI XEF2-ETCHING - INFLUENCE OF ION/NEUTRAL FLUX RATIO AND ION ENERGY/, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(4), 1996, pp. 2138-2150
Authors:
VUGTS MJM
JOOSTEN GJP
VANOOSTERUM A
SENHORST HAJ
BEIJERINCK HCW
Citation: Mjm. Vugts et al., SPONTANEOUS ETCHING OF SI(100) BY XEF2 - TEST-CASE FOR A NEW BEAM SURFACE EXPERIMENT, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(6), 1994, pp. 2999-3011
Authors:
JOOSTEN GJP
VUGTS MJM
SPRUIJT HJ
SENHORST HAJ
BEIJERINCK HCW
Citation: Gjp. Joosten et al., DYNAMICS OF ION-ASSISTED ETCHING IN THE SI(100) XEF2/AR+ SYSTEM ON A TIME-SCALE 100-MU-S-1000-S/, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(3), 1994, pp. 636-647
Risultati:
1-7
|