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Results: 4

Authors: Tserepi, A Valamontes, ES Tegou, E Raptis, I Gogolides, E
Citation: A. Tserepi et al., Surface and line-edge roughness in plasma-developed resists, MICROEL ENG, 57-8, 2001, pp. 547-554

Authors: Patsis, GP Tserepi, A Raptis, I Glezos, N Gogolides, E Valamontes, ES
Citation: Gp. Patsis et al., Surface and line-edge roughness in solution and plasma developed negative tone resists: Experiment and simulation, J VAC SCI B, 18(6), 2000, pp. 3292-3296

Authors: Patsis, GP Glezos, N Raptis, I Valamontes, ES
Citation: Gp. Patsis et al., Simulation of roughness in chemically amplified resists using percolation theory, J VAC SCI B, 17(6), 1999, pp. 3367-3370

Authors: Valamontes, SE Panos, CN Valamontes, ES
Citation: Se. Valamontes et al., The helicoid multi-groove frictional pump as a direct compressor in the atmosphere under re-examination of the coefficient of the internal viscosity, VACUUM, 53(3-4), 1999, pp. 421-425
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