Authors:
Patsis, GP
Tserepi, A
Raptis, I
Glezos, N
Gogolides, E
Valamontes, ES
Citation: Gp. Patsis et al., Surface and line-edge roughness in solution and plasma developed negative tone resists: Experiment and simulation, J VAC SCI B, 18(6), 2000, pp. 3292-3296
Citation: Se. Valamontes et al., The helicoid multi-groove frictional pump as a direct compressor in the atmosphere under re-examination of the coefficient of the internal viscosity, VACUUM, 53(3-4), 1999, pp. 421-425