Authors:
Wendt, JR
Krygowski, TW
Vawter, GA
Blum, O
Sweatt, WC
Warren, ME
Reyes, D
Citation: Jr. Wendt et al., Fabrication of diffractive optical elements for an integrated compact optical microelectromechanical system laser scanner, J VAC SCI B, 18(6), 2000, pp. 3608-3611
Authors:
Hahn, YB
Lee, JW
Vawter, GA
Shul, RJ
Abernathy, CR
Hays, DC
Lambers, ES
Pearton, SJ
Citation: Yb. Hahn et al., Reactive ion beam etching of GaAs and related compounds in an inductively coupled plasma of Cl-2-Ar mixture, J VAC SCI B, 17(2), 1999, pp. 366-371