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Results: 1
Preparation of thin copper films from the vapour phase of volatile copper(I) and copper(II) derivatives by the CVD method
Authors:
Vertoprakhov, VN Krupoder, SA
Citation:
Vn. Vertoprakhov et Sa. Krupoder, Preparation of thin copper films from the vapour phase of volatile copper(I) and copper(II) derivatives by the CVD method, USP KH, 69(12), 2000, pp. 1149-1177
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