Authors: Celii, FG Moise, TS Summerfelt, SR Archer, L Chen, P Gilbert, S Beavers, R Bilodeau, SM Vestyck, DJ Johnston, ST Russell, MW Van Buskirk, PC

Citation: Fg. Celii et al., Plasma etching and electrical characterization of Ir/IrO2/PZT/Ir FeRAM device structures, INTEGR FERR, 27(1-4), 1999, pp. 1271-1285

Authors: Bilodeau, SM Johnston, ST Russell, MW Vestyck, DJ Van Buskirk, PC

Citation: Sm. Bilodeau et al., Voltage scaling of ferroelectric thin films deposited by CVD, INTEGR FERR, 26(1-4), 1999, pp. 821-837