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Results: 1-4 |
Results: 4
Application of the low-loss scanning electron microscope image to integrated circuit technology - Part II - Chemically-mechanically planarized samples
Authors: Wells, OC McGlashan-Powell, M Vladar, AE Postek, MT
Citation: Oc. Wells et al., Application of the low-loss scanning electron microscope image to integrated circuit technology - Part II - Chemically-mechanically planarized samples, SCANNING, 23(6), 2001, pp. 366-371
Application of the low-loss scanning electron microscope image to integrated circuit technology part 1 - Applications to accurate dimension measurements
Authors: Postek, MT Vladar, AE Wells, OC Lowney, JL
Citation: Mt. Postek et al., Application of the low-loss scanning electron microscope image to integrated circuit technology part 1 - Applications to accurate dimension measurements, SCANNING, 23(5), 2001, pp. 298-304
Image sharpness measurement in the scanning electron microscope - Part III
Authors: Zhang, NF Postek, MT Larrabee, RD Vladar, AE Keery, WJ Jones, SN
Citation: Nf. Zhang et al., Image sharpness measurement in the scanning electron microscope - Part III, SCANNING, 21(4), 1999, pp. 246-252
Time-lapse scanning electron microscopy for measurement of contamination rate and stage drift
Authors: Vladar, AE
Citation: Ae. Vladar, Time-lapse scanning electron microscopy for measurement of contamination rate and stage drift, SCANNING, 21(3), 1999, pp. 191-196
Risultati: 1-4 |