Authors:
GRAF D
LAMBERT U
BROHL M
EHLERT A
WAHLICH R
WAGNER P
Citation: D. Graf et al., COMPARISON OF HIGH-TEMPERATURE ANNEALED CZOCHRALSKI SILICON-WAFERS AND EPITAXIAL WAFERS, Materials science & engineering. B, Solid-state materials for advanced technology, 36(1-3), 1996, pp. 50-54
Authors:
GRAF D
LAMBERT U
BROHL M
EHLERT A
WAHLICH R
WAGNER P
Citation: D. Graf et al., IMPROVEMENT OF CZOCHRALSKI SILICON-WAFERS BY HIGH-TEMPERATURE ANNEALING, Journal of the Electrochemical Society, 142(9), 1995, pp. 3189-3192