Authors:
JONAS S
PALUSZKIEWICZ C
PTAK WS
WALASEK E
Citation: S. Jonas et al., STUDIES ON THE MECHANISM OF CHEMICAL-REACTIONS DURING TIXNY LAYERS DEPOSITION, Bulletin of the Polish Academy of Sciences. Chemistry, 45(4), 1997, pp. 403-407
Authors:
JONAS S
PTAK WS
SADOWSKI W
WALASEK E
PALUSZKIEWICZ C
Citation: S. Jonas et al., FTIR IN-SITU STUDIES OF THE GAS-PHASE REACTIONS IN CHEMICAL-VAPOR-DEPOSITION OF SIC, Journal of the Electrochemical Society, 142(7), 1995, pp. 2357-2362