Authors:
MARTINO R
FERGUSON R
MOLLESS A
LIEBMANN L
NEISSER M
WEED J
CALLEGARI S
Citation: R. Martino et al., LITHOGRAPHIC EVALUATION OF THE HYDROGENATED AMORPHOUS-CARBON FILM, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2949-2953
Authors:
FERGUSON R
MARTINO R
BUDD R
HUGHES G
SKINNER J
STAPLES J
AUSSCHNITT C
WEED J
Citation: R. Ferguson et al., ETCHED-QUARTZ FABRICATION ISSUES FOR A 0.25 MU-M PHASE-SHIFTED DYNAMIC RANDOM-ACCESS MEMORY APPLICATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2645-2650