Authors:
KIRCHHOFF V
KOPTE T
WINKLER T
SCHULZE M
WIEDEMUTH P
Citation: V. Kirchhoff et al., DUAL MAGNETRON SPUTTERING (DMS) SYSTEM WITH SINE-WAVE POWER-SUPPLY FOR LARGE-AREA COATING, Surface & coatings technology, 98(1-3), 1998, pp. 828-833
Citation: T. Rettich et P. Wiedemuth, HIGH-POWER GENERATORS FOR MEDIUM FREQUENCY SPUTTERING APPLICATIONS, Journal of non-crystalline solids, 218, 1997, pp. 50-53