Citation: R. Wuhrer et al., EFFECT OF NITROGEN PARTIAL-PRESSURE ON THE SURFACE-MORPHOLOGY AND PROPERTIES OF REACTIVE DC MAGNETRON-SPUTTERED (TI,AL)N COATINGS, Scripta materialia, 37(8), 1997, pp. 1163-1169
Citation: R. Wuhrer et al., STUDY ON DC MAGNETRON SPUTTER-DEPOSITION OF TITANIUM ALUMINUM NITRIDETHIN-FILMS - EFFECT OF ALUMINUM CONTENT ON COATING, Thin solid films, 291, 1996, pp. 339-342