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Fabry, L
Range, KJ
Wahlich, R
Kissinger, G
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Lambert, U
Huber, A
Grabmeier, J
Obermeier, G
Vanhellemont, J
Wahlich, R
Kissinger, G
Citation: U. Lambert et al., Dependence of gate oxide integrity on grown-in defect density in Czochralski grown silicon, MICROEL ENG, 48(1-4), 1999, pp. 127-130
Authors:
Fischer, A
Grabolla, T
Richter, H
Obermeier, G
Krottenthaler, P
Wahlich, R
Citation: A. Fischer et al., Mechanical strength of 300 mm diameter silicon wafers at high temperatures: modeling and simulation, MICROEL ENG, 45(2-3), 1999, pp. 209-223