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Results:
1-3
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Results: 3
Sodium distribution in thin-film anodic bonding
Authors:
Visser, MM Weichel, S Storas, P de Reus, R Hanneborg, AB
Citation:
Mm. Visser et al., Sodium distribution in thin-film anodic bonding, SENS ACTU-A, 92(1-3), 2001, pp. 223-228
Low-temperature anodic bonding to silicon nitride
Authors:
Weichel, S de Reus, R Bouaidat, S Rasmussen, PA Hansen, O Birkelund, K Dirac, H
Citation:
S. Weichel et al., Low-temperature anodic bonding to silicon nitride, SENS ACTU-A, 82(1-3), 2000, pp. 249-253
Fusion bonding of Si wafers investigated by x ray diffraction
Authors:
Weichel, S Grey, F Rasmussen, K Nielsen, M Feidenhans'l, R Howes, PB Vedde, J
Citation:
S. Weichel et al., Fusion bonding of Si wafers investigated by x ray diffraction, APPL PHYS L, 76(1), 2000, pp. 70-72
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1-3
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