Authors:
Panda, S
Kim, J
Weiller, BH
Economou, DJ
Hoffman, DM
Citation: S. Panda et al., Low temperature chemical vapor deposition of titanium nitride films from tetrakis(ethylmethylamido)titanium and ammonia, THIN SOL FI, 357(2), 1999, pp. 125-131
Citation: Bh. Weiller, Chemical microsensors for gas detection and applications to space systems, MICROENGINEERING AEROSPACE SYSTEMS, 1999, pp. 449-484