Authors: Panda, S Kim, J Weiller, BH Economou, DJ Hoffman, DM

Citation: S. Panda et al., Low temperature chemical vapor deposition of titanium nitride films from tetrakis(ethylmethylamido)titanium and ammonia, THIN SOL FI, 357(2), 1999, pp. 125-131

Authors: Weiller, BH

Citation: Bh. Weiller, Chemical microsensors for gas detection and applications to space systems, MICROENGINEERING AEROSPACE SYSTEMS, 1999, pp. 449-484