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Results:
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Results: 2
Evaluation of ultra-low-k dielectric materials for advanced interconnects
Authors:
Jin, C Lin, S Wetzel, JT
Citation:
C. Jin et al., Evaluation of ultra-low-k dielectric materials for advanced interconnects, J ELEC MAT, 30(4), 2001, pp. 284-289
Kinetics of copper drift in low-kappa polymer interlevel dielectrics
Authors:
Loke, ALS Wetzel, JT Townsend, PH Tanabe, T Vrtis, RN Zussman, MP Kumar, D Ryu, C Wong, SS
Citation:
Als. Loke et al., Kinetics of copper drift in low-kappa polymer interlevel dielectrics, IEEE DEVICE, 46(11), 1999, pp. 2178-2187
Risultati:
1-2
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