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Results: 3
Nitridation of silicon oxide layers studied with ion beam analysis on the nanometer scale
Authors: Markwitz, A White, GV
Citation: A. Markwitz et Gv. White, Nitridation of silicon oxide layers studied with ion beam analysis on the nanometer scale, ADVAN MATER, 13(12-13), 2001, pp. 1027
Ion microscope investigations of non-uniform surfaces of thin SiO2 films produced by high-temperature nitridation experiments
Authors: Markwitz, A Trompetter, WJ White, GV Brown, IWM
Citation: A. Markwitz et al., Ion microscope investigations of non-uniform surfaces of thin SiO2 films produced by high-temperature nitridation experiments, NUCL INST B, 181, 2001, pp. 354-359
Influence of the native oxide layer on the silicon surface during initial stages of nitridation
Authors: Markwitz, A White, GV Trompetter, WJ Brown, IWM
Citation: A. Markwitz et al., Influence of the native oxide layer on the silicon surface during initial stages of nitridation, MIKROCH ACT, 137(1-2), 2001, pp. 49-56
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