Authors:
Wright, RV
Patel, A
Pealat, M
Nonninger, R
Diels, R
Enoksson, P
Fox, C
Netter, P
Citation: Rv. Wright et al., Development of micromechanical and optical devices incorporating depositedPZT films, INTEGR FERR, 33(1-4), 2001, pp. 209-220
Authors:
Kirby, PB
Wright, RV
Gaucher, P
Galtier, P
Kofoed, L
Gullov, JO
Von Munch, W
Eichner, D
Ploss, B
Kruger, JK
Citation: Pb. Kirby et al., Report on Brite-EuRam project sensors and mechatronic devices using ferroelectric thin films SEMDEFT, J PHYS IV, 8(P9), 1998, pp. 161-169