Authors:
YARALIOGLU GG
ATALAR A
MANALIS SR
QUATE CF
Citation: Gg. Yaralioglu et al., ANALYSIS AND DESIGN OF AN INTERDIGITAL CANTILEVER AS A DISPLACEMENT SENSOR, Journal of applied physics, 83(12), 1998, pp. 7405-7415
Authors:
MANALIS SR
MINNE SC
QUATE CF
YARALIOGLU GG
ATALAR A
Citation: Sr. Manalis et al., 2-DIMENSIONAL MICROMECHANICAL BIMORPH ARRAYS FOR DETECTION OF THERMAL-RADIATION, Applied physics letters, 70(24), 1997, pp. 3311-3313