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Authors: OZASA K YE TC AOYAGI Y

Citation: K. Ozasa et al., DEPOSITION OF GALLIUM OXIDE AND INDIUM OXIDE ON GAAS FOR IN-SITU PROCESS USE BY ALTERNATING SUPPLY OF TEGA, TMIN, AND H2O2 AS SURGE PULSES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(1), 1994, pp. 120-124

Authors: OZASA K YE TC AOYAGI YB

Citation: K. Ozasa et al., DEPOSITION OF THIN INDIUM OXIDE FILM AND ITS APPLICATION TO SELECTIVEEPITAXY FOR IN-SITU PROCESSING, Thin solid films, 246(1-2), 1994, pp. 58-64

Authors: OZASA K YE TC AOYAGI Y

Citation: K. Ozasa et al., COMPOSITION CHANGE OF INDIUM OXIDE FILM BY TRIETHYLGALLIUM IRRADIATION PREPARED FOR IN-SITU SELECTIVE EPITAXY USE, JPN J A P 1, 32(10), 1993, pp. 4732-4736

Authors: OZASA K YE TC AOYAGI Y

Citation: K. Ozasa et al., SELECTIVE EPITAXY OF GAAS ON INDIUM OXIDE MASK FOLLOWED BY IN-SITU REMOVAL OF THE MASK, Applied physics letters, 63(12), 1993, pp. 1634-1636