Authors: Hillard, RJ Ramey, SM Ye, CW

Citation: Rj. Hillard et al., Modeling of ultrashallow spreading resistance probe calibration curves, J VAC SCI B, 18(1), 2000, pp. 389-392

Authors: Hartford, EJ Ramey, SM Ye, CW Hartford, CL

Citation: Ej. Hartford et al., Comparison of contact radius models for ultrashallow spreading resistance profiles, J VAC SCI B, 18(1), 2000, pp. 401-404