Authors: Yew, JY Chen, LJ Wu, WF

Citation: Jy. Yew et al., Formation and growth of CoSi2 on (001)Si inside 0.2-2 mu m oxide openings prepared by electron-beam lithography, J VAC SCI B, 17(3), 1999, pp. 939-944

Authors: Yew, JY Chen, LJ Wu, WF

Citation: Jy. Yew et al., Effects of lateral confinement on the growth of CoSi and CoSi2 on (001)Si inside 0.2-2 mu m oxide openings prepared by electron beam lithography, MATER CH PH, 61(1), 1999, pp. 42-45