Authors: Kim, SH Kim, JH Park, HD Yoon, GW

Citation: Sh. Kim et al., AlN-based film bulk acoustic resonator devices with W/SiO2 multilayers reflector for rf bandpass filter application, J VAC SCI B, 19(4), 2001, pp. 1164-1168

Authors: Yoon, GW Park, JD

Citation: Gw. Yoon et Jd. Park, Fabrication of ZnO-based film bulk acoustic resonator devices using W/SiO2multilayer reflector, ELECTR LETT, 36(16), 2000, pp. 1435-1437