Authors: Choi, WK Bera, LK Chen, JH Feng, W Pey, KL Yoong, H Mi, J Zhang, F Yang, CY

Citation: Wk. Choi et al., Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films, MAT SCI E B, 75(2-3), 2000, pp. 184-186