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Results: 1-3 |
Results: 3
X-ray focusing by planar parabolic refractive lenses made of silicon
Authors: Aristov, VV Grigoriev, MV Kuznetsov, SM Shabelnikov, LG Yunkin, VA Hoffmann, M Voges, E
Citation: Vv. Aristov et al., X-ray focusing by planar parabolic refractive lenses made of silicon, OPT COMMUN, 177(1-6), 2000, pp. 33-38
Epitaxial growth of quantum-size Si and SiGe structures on Si submicronmesa-substrates
Authors: Avrutin, VS Izumskaya, NF Vyatkin, AF Yunkin, VA
Citation: Vs. Avrutin et al., Epitaxial growth of quantum-size Si and SiGe structures on Si submicronmesa-substrates, IAN FIZ, 63(2), 1999, pp. 274-277
Scaling of silicon trench etch rates and profiles in plasma etching
Authors: Lukichev, VF Yunkin, VA
Citation: Vf. Lukichev et Va. Yunkin, Scaling of silicon trench etch rates and profiles in plasma etching, MICROEL ENG, 46(1-4), 1999, pp. 315-318
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